清华大学教授朱荣讲述基于热感应的多功能传感器与电子皮肤

直播时间：2024年11月1日（周五）20:00-21:30

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【直播简介】

北京时间2024年11月1日晚八点，iCANX Talks 第210期邀请到了清华大学朱荣教授作为主讲嘉宾，华中科技大学助理研究员布天昭、深圳大学长聘副教授孟博也将进行分享！北京理工大学教授张帅龙担任研讨嘉宾，中国科学院北京纳米能源与系统研究所研究员孙其君担任主持人。

这将是一场汇聚顶尖学者的盛会，共同探讨前沿科技与学术挑战！更多精彩，敬请期待！

【嘉宾介绍】

Rong Zhu

清华大学

Multifunctional Sensors and E-Skin based on Thermosensation

【Abstract】

Although wearable electronic technology has achieved significant progress, challenges still exist in multifunctional integration, simple fabrication, and low-cost applications. Human skin is a smart sensory system with multi-sensations via its thermoreceptors and mechanoreceptors. Unlike the public attentions on the mechanoreceptors, we focus on the thermoreceptor because of its unique multifunction. Thermosensation of human skin responds to not only temperature stimuli, but also thermal conductivity of touched material. In addition, the thermosensation also responds to wind flow because the flow takes away the heat from skin. These delicate sensations enrich human interactions with environment. Inspired by the thermoreceptor of human skin, we propose a new sensing principle based on thermosensation and utilize thin-film thermistors fabricated on flexible polyimide to implement multifunctional integration of pressure, proximity, matter, temperature, flow, slip, and texture sensing into flexible sensors and electronic skin (e-skin). These sensors and e-skin have the merits of high integration, simple structure, low cost, and good adjustability. We apply the flexible sensors and electronic skin to healthcare and intelligent robots, and combine artificial intelligence to realize human physiological monitoring, wearable limb motion capture, robotic garbage sorting, smart home services and other applications.

柔性电子技术已经取得了引人瞩目的发展，但在多功能集成、简单制造和低成本应用方面仍存在挑战。皮肤是由热感受器和机械感受器组成的具有多种感觉的智能感知系统。与机械感受器不同，热感受器具有独特的多功能性。皮肤利用热感应不仅对温度刺激有反应，而且对接触材料的导热性亦有感应，皮肤也会感觉到风，这是由于气流带走皮肤的热量，丰富的热感觉为人类与外界环境的交互提供了信息保障。受皮肤热感受器启发，我们提出了全新的热感应多模传感原理，利用柔性热敏薄膜与外界传导/对流换热对自身电阻的调控，实现了压力、接近、物质、温度、流量、滑动、纹理等信息感知的柔性传感器和多功能电子皮肤，具有高集成、简结构、低成本、易调控的特点。我们将柔性传感器和电子皮肤应用于医疗健康和智能机器人，结合人工智能技术，实现了脉搏/血压/呼吸等生理监测，可穿戴肢体运动捕捉，机器人垃圾分拣、智能家庭服务等应用。

【BIOGRAPHY】

Rong Zhu is Full Professor at Department of Precision Instrument in Tsinghua University, China. She is also serving as Executive Vice President of MEMSNEMS society, China Instrument and Control Society. Prof. Zhu has been working on research and development of micro/nano electromechanical devices, intelligent measurement and control systems. Her current researches focus on flexible sensors and multifunctional e-skins, multimodal tactile sensors, and applications specializing in smart robots and healthcare monitoring. Prof. Zhu has published more than 200 peer-reviewed journal/conference papers, held more than 30 granted patents. She has won National Technological Invention Award (China), Provincial and Ministerial Award for Science and Technology Progress (China), Golden Awards of International Invention Exhibition, Transducers Outstanding Paper Award, World Artificial Intelligence Conference Youth Outstanding Paper Award, etc.

朱荣，清华大学精密仪器系长聘教授，博士生导师，兼任中国仪器仪表学会微纳器件与系统技术分会常务副理事长。主要研究方向：微/纳机电器件及智能测控系统。近年主要研究：柔性传感器与多功能电子皮肤、多感知触觉传感器、智能机器人与健康监测应用等。朱荣教授已在Science Robotics、Science Advances、Nature Communications、Advanced Materials等期刊和国际会议发表学术论文200余篇，获授权国内外发明专利30余项。科研成果曾获国家技术发明二等奖、教育部技术发明一等奖和二等奖、北京市科学技术一等奖、国际发明展览会金奖、Transducers优秀论文奖、世界人工智能大会优秀论文奖、首都前沿学术成果等。

布天昭

华中科技大学

Design and Fabrication of Flexible Sensors for Robotic Tactile Sensing

【ABSTRACT】

Haptic perception is the most challenging perception technology in robotic systems, which is of great significance for robots. In recent years, based on the coupling of triboelectricity and semiconductors, tribotronic electronics have established a direct interaction mechanism between the external environment and the electronics. Compared with traditional tactile sensing methods such as piezoresistive, capacitive, and piezoelectric, tribotronic devices have the advantages of active, low power consumption, wide choice of materials, proximity sensing, and weak triggering response, which brings new opportunities for the development of robotic tactile sensing technology. We are committed to the design and manufacture of flexible sensors for robot tactile sensing application research. In terms of sensing principle, we have verified that tribotronic devices can theoretically achieve a spatial resolution of up to 20 nm for tactile sensing by establishing a nano-scale tribotronic transistor model. In terms of structural design, high-performance proximity and contact sensing is realized through the design of floating gate structures. In terms of fabrication, the consistency and stability of device performance are improved by combining the traditional micro-nano-machining process and the new flexible electronic process. In terms of integration and application, a high-performance haptic sensing feedback closed-loop system has been constructed, and experimental verification of typical dexterous operations such as robotic grasping has been completed.

触觉感知是机器人系统中最具挑战的感知技术，对于机器人的智能化、仿生化具有重要意义。近年来，基于摩擦电与半导体的耦合，摩擦电子器件建立了外部环境与电子器件的直接交互机制。与传统的压阻、电容、压电等触觉传感方法相比，摩擦电子器件具有主动式、低功耗、材料选择广、接近觉感知、微弱触发响应的优势，为机器人触觉感知技术的发展带来了新的机遇。我们致力于柔性传感器设计制造与机器人触觉感知应用研究。在传感原理方面，通过建立微纳尺度摩擦电晶体管模型，验证了摩擦电子器件触觉传感理论上可达到最高20 nm的空间分辨率。在结构设计方面，通过浮栅结构设计实现了高性能接近和接触传感。在制造方面，通过结合传统微纳加工工艺和新型柔性电子工艺，提高了器件性能的一致性与稳定性。在集成应用方面，构建了高性能触觉传感反馈闭环系统，完成了机器人抓握等典型灵巧操作的实验验证。

【BIOGRAPHY】

Bu Tianzhao, Assistant Research Fellow, received his PhD degree from University of Chinese Academy of Sciences in 2020, and his research area is flexible electronics design, manufacturing and application. He has published more than 40 SCI papers with more than 1900 citations and 24 H-factor, including 5 papers as the first author in Nature Communications, Advanced Materials, Science Bulletin and other top journals, and 6 papers as the co-first author. In addition, he has been granted 4 patents, presided over 3 projects of National Natural Science Foundation of China (NSFC). He was awarded a scholarship under the International Postdoctoral Exchange Fellowship Program and the Best Paper Award of the 19th International Conference on Mechanical Design (ICMD2017).

布天昭，华中科技大学助理研究员。博士毕业于中国科学院大学，入选中国科协青年人才托举工程。主要研究领域为柔性传感器设计制造与机器人触觉感知/健康监测应用领域研究，相关研究成果共发表论文40余篇，引用1900余次，H因子24，其中以第一作者和共同第一作者在Nature Communications、Advanced Materials、Science Bulletin、Soft Robotics等国际权威期刊上发表论文11篇，获授权专利3项。主持国家重点研发计划课题、国家自然科学基金委面上等项目。获选“博士后国际交流计划”派出项目、“小米青年学者”，获得第19届机械设计国际会议ICMD2017 Best Paper Award等荣誉。

孟博

深圳大学

Material and Device Designs in Biomimetic Polymer Electronics

【ABSTRACT】

This talk will highlight the latest advancements in haptic intelligence. Tactile sensors, which transform mechanical stimuli from touch-based physical interactions into electrical signals, have become increasingly vital in the rapidly evolving field of robotics. The rocketing development of artificial intelligence necessitates more sophisticated capabilities for the acquisition of precise tactile information. Active sensing technology based on the principle of triboelectricity offers a new approach to achieving high-performance tactile sensors, demonstrating significant advantages in interface sensitivity and dynamic response. In this talk, we will primarily introduce triboelectric tactile sensors. A focus will be placed on well-engineered triboelectric tactile sensor in single-electrode and non-gap contact-separation structures, which has shown remarkable capabilities of surface material identification, ultra-fast response and Shore hardness measurement. We will also introduce developments in hybridized tactile sensors designed for multifunctional tactile sensing. The integration of triboelectrification-based active sensor with typical tactile sensor (such as piezoresistive, capacitive and inductive transducers) enables the simultaneous measurement of multiple information about the objects being held and facilitating object identification. Additionally, this integration aids in the precise acquiring of static and dynamic mechanical stimuli. Intelligent robotic tactile applications realized through multiparametric tactile sensors with the aid of machine learning will be discussed as well.

本次演讲将重点介绍触觉智能的最新进展。触觉传感器，即将基于触摸的物理交互中的机械刺激转化为电信号的装置，在快速发展的机器人领域变得越来越重要。人工智能的迅猛发展需要更精细的能力来获取精确的触觉信息。基于摩擦电效应原理的主动传感技术为实现高性能触觉传感器提供了一种新方法，在界面灵敏度和动态响应方面展现出显著优势。在本次演讲中，我们将主要介绍摩擦电触觉传感器。重点将放在单电极和非间隙接触分离结构的精心设计的摩擦电触觉传感器上，这些传感器在表面材料识别、超快速响应和肖氏硬度测量方面展现出了卓越的能力。我们还将介绍为多功能触觉传感而设计的混合触觉传感器的发展。基于摩擦电效应的主动传感器与典型触觉传感器（如压阻式、电容式和电感式传感器）的集成，使得能够同时测量多个关于被握持物体的信息，从而促进物体识别。此外，这种集成还有助于精确获取静态和动态机械刺激。通过机器学习辅助的多参数触觉传感器实现的智能机器人触觉应用也将被讨论。

【BIOGRAPHY】

Bo Meng is an associate professor of Optoelectonic Engineering at Shenzhen University. He received his B.S. degree in Electronic Science Technology from Huazhong University of Science and Technology in 2011 and the Ph. D. in Microelectronics and Solid State Electronics from Peking University in 2016. He worked as a postdoctoral fellow at Peking University and joined Shenzhen University at 2018. His research interests mainly focus on flexible electronics for haptic intelligence and wearable electronics. He has published over 60 peer-reviewed articles, and he has over 20 issued patents. He was awarded the outstanding doctoral dissertation of Peking University, the best paper nomination of IEEE MEMS Conference, and the Gold medal of Geneva Invention Exhibition.

孟博，深圳大学物理与光电工程学院长聘副教授，2011年于华中科技大学获学士学位，2016年于北京大学获博士学位。他于2016年到2018年在北京大学进行博士后研究，随后于2018年6月加入深圳大学。他的主要研究方向为柔性微能源与主动传感技术，重点关注柔性电子在触觉智能、可穿戴传感与数字医疗领域的创新应用，在Energy Environmental Science、ACS Nano、Nano Energy等高水平期刊及IEEE MEMS等领域会议发表论文60余篇，累计被引3600余次，H因子27。他曾获得深圳市高层次人才，中关村雏鹰人才，北京大学优秀博士学位论文、IEEE MEMS会议最佳论文提名、日内瓦发明展金奖等。